摘要
介绍了母盘刻录中的关键技术和当前母盘刻录技术的各个研究领域及其最新进展。指出了这些技术在下一代母盘刻录中的应用前景。
Disk mastering is the process of making the stamper for disk molding. It is the core technology in disk replications. Key technologies of disk mastering are introduced. Its research fields and their recent developments are surveyed. Practical application of current technologies in next generation mastering is anticipated.
出处
《光学技术》
CAS
CSCD
北大核心
2005年第6期822-826,共5页
Optical Technique
基金
973国家重点基础研究规划资助项目(G19990330)
关键词
母盘刻录
电子束
近场
超分辨技术
直接母盘刻录系统
disk mastering
electron beam
near field
super resolution technology
direct mastering system
