摘要
利用直流磁控溅射技术在Gd基体上分别镀不锈钢和Ti。用扫描电镜(SEM)、能谱仪、XPS对薄膜表征,用引拉法测定了薄膜的附着强度。结果表明:采用溅射法在Gd基体上镀膜表面质量好,膜基界面结合良好,附着强度大(15MPa)。
Gd substrates were differently coated with Ti and 1Cr18Ni9Ti by means of DC magnetron sputtering technology. The characteristics of the films have been investigated by scanning electron microscopy (SEM), EDS, X-ray photoelectron spectroscopy(XPS), and the adhesion of films were tested by tension test. The results show that the surfaces of films are smooth and perfect, the interferences between Gd and films join together strongly, and the adhesion strength is larger than 15MPa in these tests.
出处
《表面技术》
EI
CAS
CSCD
2005年第6期19-21,共3页
Surface Technology
基金
国家十五863基金资助项目(2002AA324010)
关键词
磁控溅射
附着性
界面
磁制冷材料
Magnetron sputtering
Adhesion
Interference
Magnetic refrigerant materials