摘要
针对铝乳胶源涂布与气相镓相结合的开管受主双质扩散技术。
This paper is aimed at the open tube acceptor double impurity diffusion technique of combining the coating of aluminium emulsion with the gaseous phase Ga to analyse and discuss its doping mechanism.
关键词
工艺方法
镓铝双质扩散
掺杂机制
晶闸管
technological method,double impurity diffusion of gallium aluminium,doping mechanism
