分步重复投影光刻机精密快速定位工件台研究

Investigations of Precision Fast Positioning Stage for Wafer Stepper

介绍了“１．５～２微米实用型分步重复投影光刻机”用的精密快速定位工件台的设计、结构特点、精度分析、检测及使用情况。工件台由大行程Ｘ－Ｙ工件台、微动台（Δｘ，Δｙ）和调平微转台（Δｚ１，Δｚ２，Δｚ３，Δθ）组成。同时该工件台利用大行程Ｘ－Ｙ工件台粗动兼微动与调平微转台的组合完成了“１０∶１分步重复投影光刻机”

The designing,constitution features,accuracy analysis,testing and operating of the precision fast positioning stage for 1.5-2μm practical model wafer stepper are introduced in the paper.The stage consists of large travelling distance X Y stage,microdriving stage (Δ x ,Δ y ) and leveling microrotation stage (Δ z 1,Δ z 2,Δ z 3,Δ θ ).At the same time,the stage use the combination of large travelling distance X Y stage coarse moving,microdriving and levelling microrotating stage to finish the development of 10∶1 wafer stepper.