激光烧蚀成形光路与激光三角测量光路的集成

Integration of an Optical Triangulation and a Laser Ablation Optical System

针对激光烧蚀不能严格控制沿光轴方向尺寸精度的问题，本文研究将激光三角测量光路集成于激光烧蚀光路，测量数据反馈控制脉冲激光，讨论了光路集成中的若干问题。

To improve the demensional precision of laser ablation, an optical triangulation system is integrated into a laser ablation system and the data measured are used to control the parameters of the pulse laser. Several key problems of the integration are studied.