多层介质光学膜系的误差分析———膜层厚度变化的灵敏度因子

Error analysis of dielectric optical multilayer variation of sensitivity factor with layer thickness

文中推导了对于给定膜系的特定膜层的厚度变化的灵敏度因子计算公式，并给出了用计算机对不同膜系的计算实例。分析了厚度灵敏度因子对膜系透射光谱的灵敏谱段、灵敏膜层等特性的影响规律。

The formulas of sensitivity factor varied with the thickness of specific layer of a multila yer is derived in this paper. The examples of different multilayers are given, the influence of thickness sensitivity factor on the sensitive spectrum and layer of transmittance are analysed.Finally, a method of defining thickness allowable error is given.