摘要
本文提出了一种采用脉冲MOS结构测量少子产生寿命的统一表征谱方法,此方法基于任何一种收敛弛豫过程均可以转换成一种衰减的指数函数的思想,应用差值取样原理获得脉冲MOS结构瞬态电容差值谱,从谱图中我们可以直接得到关于少子产生寿命的信息.本文综合了众多脉冲MOS结构测量少子产生寿命的物理模型,分析了不同模型之间的精细差别(<10%).
A unified spectral analysis method using pulsed MOS C-t characteristics has been presented in the paper, which can be used to determine the minority carrier generation lifetime. This method is based on an idea that any kind of convergent relaxation process can be expressed as the damped exponential function. Here we put forward a new method with the difference sampling principle, from the transient capacitance difference spectroscopy, we can directly get the information about the minority carrier generation lifetime. We investigated some currently accepted models for the minority carrier generation lifetime, made a comparison with these different models, and found that their maximum difference is less than 10%.
出处
《电子学报》
EI
CAS
CSCD
北大核心
1996年第8期19-22,共4页
Acta Electronica Sinica
关键词
少子产生寿命
脉冲MOS电容
半导体器件
Minority carrier lifetime
Pulsed MOS structure
Difference sampling
Transient capacitance difference spectroscopy