摘要
综述了合金薄膜应变压力传感器的现状、发展趋势、技术关键及应用情况。合金敏感薄膜电阻在应变压力传感器上的应用克服了粘贴式应变压力传感的缺点,使压力传感器结构更精细,性能更优越,适应各种恶劣环境测量压力的要求。
In this article, the status and development trend, the key technology and the application of alloy thin film piezoresistive sensor are reviewed. The use of alloy thin film resistor as sensitive layer in piezoresistive sensor overcomesthe shortcoming of stickup pressure sensor. Due to their more elaborate structure and superior properties, alloy thin film piezoresistive sensor can be used in all kinds of harsh environments.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2005年第12期31-34,共4页
Materials Reports
基金
国家自然科学基金(NO6017043)
关键词
合金薄膜
压力传感器
进展
alloy thin film, piezoresistive sensor,development
