摘要
为了提高锰铜超高压力传感器的测压上限，须采用超高压力下绝缘性能好的无机材料作为绝缘封装层。用Al2O3薄膜作箔式锰铜超高压力传感器的绝缘层，代替现有箔式锰铜计中所使用的粘胶剂及PTFE膜，从根本上消除高压旁路效应，提高传感器的测压上限。初步的动态超高压测试结果表明，该传感器所承受的压力为54．55GPa，压阻系数为0．0237GPa，延续时间可达1．6μs。
In order to extending the measurement range of manganin gauges, the manganin sensing elements are encapsulated in inorganic material. Al2O3 thin film is deposited on both sides of manganin fiols. Consequently, the high-pressure shunt effect is eliminated radically and the measurement range is extended. According to the initial dynamic high-pressure test, the pressure of the new sensor endured is up to 54. 55GPa. The sensor records show its piezoresistance coefficient is 0. 0237 GPa^-1 and its lifespan 1.6μs.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2005年第F11期464-465,共2页
Materials Reports
基金
“十五”电子预研资助项目（AW030412）
