摘要
介绍了一种本实验室开发的集成湿度传感器,它实现了湿敏电容和接口电路在一块芯片上的集成。重点分析了它的接口电路,基于施密特触发器构建,实现电容值与频率值的转换。对样片进行了测试,电容值与湿度值近似为线性关系;但是,输出波形的占空比与理论值有较大的偏差。通过分析,给出了测试结果发生偏差的原因。最后,对施密特触发器的参数进行优化,重新对电路的结构进行了设计,实现了与实验室第二代湿度传感器的集成。
A new integrated humidity sensor is dealt with. The humidity-sensitive capacitance and the interface are integrated into one chip. The interface circuit, which is based on the Schmitt trigger, works as a capacitor-frequency converter. The capacitor and the relative humidity satisfied a linear relationship during testing, but the duty cycle of the output waveform displayed a large difference from theoretic calculation. The reason for the difference is analyzed. Circuit schematic and parameters are redesigned to realize the integration with a new humidity sensor designed in our laboratory.
出处
《微电子学》
CAS
CSCD
北大核心
2005年第6期647-650,654,共5页
Microelectronics
基金
国家自然科学基金资助项目(60476019)
江苏省自然科学基金资助项目(BK2003052)