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一种湿度传感器接口电路的分析与改进 被引量:2

Analysis and Improvement of an Interface Circuit for Humidity Sensor
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摘要 介绍了一种本实验室开发的集成湿度传感器,它实现了湿敏电容和接口电路在一块芯片上的集成。重点分析了它的接口电路,基于施密特触发器构建,实现电容值与频率值的转换。对样片进行了测试,电容值与湿度值近似为线性关系;但是,输出波形的占空比与理论值有较大的偏差。通过分析,给出了测试结果发生偏差的原因。最后,对施密特触发器的参数进行优化,重新对电路的结构进行了设计,实现了与实验室第二代湿度传感器的集成。 A new integrated humidity sensor is dealt with. The humidity-sensitive capacitance and the interface are integrated into one chip. The interface circuit, which is based on the Schmitt trigger, works as a capacitor-frequency converter. The capacitor and the relative humidity satisfied a linear relationship during testing, but the duty cycle of the output waveform displayed a large difference from theoretic calculation. The reason for the difference is analyzed. Circuit schematic and parameters are redesigned to realize the integration with a new humidity sensor designed in our laboratory.
出处 《微电子学》 CAS CSCD 北大核心 2005年第6期647-650,654,共5页 Microelectronics
基金 国家自然科学基金资助项目(60476019) 江苏省自然科学基金资助项目(BK2003052)
关键词 MEMS 湿度传感器 接口电路 频率输出 MEMS! Humidity sensor Interface circuit Frequency output
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参考文献5

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共引文献10

同被引文献8

  • 1刘俊,徐佩,石云波.微弱电容信号的离散频率测试方法及其硬件电路的实现[J].兵工学报,2005,26(4):500-504. 被引量:5
  • 2程坤,黄庆安,秦明,茅盘松.一种简单实用的差频方法原理研究及应用[J].电子器件,2006,29(2):473-475. 被引量:10
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