扫描电子声显微镜的成像机理及其应用

Theory and Applications of Scanning Electron Acoustic Microscope

扫描电子声显微镜是近几年国际上发展起来的一种新型的显微观察与成像工具，由于它的成像机理与以往的扫描电镜完全不同，特别是它能进行非破坏性的揭示样品亚表面特性的能力，因此，正越来越多的受到人们的重视与研究．本文主要介绍了扫描电子声显微镜的发展历史，简述了电子声成像技术的基本工作原理．对电子声成像的热波理论、过剩载流子理论、压电耦合理论和磁耦合理论四种成像机理进行了较为详细的分析归纳，并指出了其适用范围．显示了电子声成像技术在金属材料，半导体材料及陶瓷材料中的应用．最后展望了电子产成像理论、技术及应用的发展趋势．

Scanning Electron Acoustic Microscope (SEAM) is a newly developed observing and imaging tool ona micro-scale. It has been gained attention more and more due to its different imaging mechwhsnl withgeneral scaluiing electron microscope and ability of showing the subsurfaCe properties of a sample. Thedevelopment and principle of operation about electron acoustic imaging technique are described in thispaper. The four kinds of imaging mechanisms: thermal wave coupling, excess carrier coupling, piezoelectriccoupling and magnetic coupling have been discussed and their application areas have been also indicated.The applications of SEAM in metal, semiconductor and ceramic materials are presellted. In the final, thepotential development and applications for SEAM are discussed.