碳热还原法制备氮化硅粉体的反应过程分析

Reaction Analysis of Preparation of Si_3N_4 Powder by Carbothermic Method

对以碳热还原法制备氮化硅粉体的ＳｉＯ２－Ｃ－Ｎ２系统进行化学反应热力学和动力学的分析，从而发现在氮气氛不足的条件下，这一系统的反应产物将由氮化硅变为碳化硅；在氮气充足的情况下，随着温度的升高，生成物中碳化硅的量也会逐步增加．这一分析结果通过实验得到了验证．

The thermodynamics and kinetics of SiO-C-N2 system used in preparing silicon nitride powder were analyzed. It showed that when nitrogen flow was not enough, the product of this system changed into silicon carbide; on the other hand, when nitrogen flow was enough, with the raising of temperature, the content of silicon carbide in product increased.