Ni,Ti及NiTi合金低能电子散射的Monte Carlo模拟

Monte Carlo Simulation on Low-Energy Electrons Scattering in Ni, NiTi and Ti Bulks

采用MonteCarlo方法,模拟了低能电子束(能量E0≤5keV)作用下Ni,Ti及NiTi合金固体中的电子散射,分析了3种金属/合金中散射电子的能量与空间分布。研究表明:(1)入射电子能量E0越小,各材料的背散射电子(BSEs)深度、吸收电子(AEs)深度及散射电子能量损失的深度均越小,分辨率越高;(2)相同E0下,各材料的BSEs,AEs及能量损失深度均有Ni<NiTi<Ti的排序,分辨率为Ni>NiTi>Ti;(3)NiTi合金的BSEs深度、AEs深度及能量损失的深度和分辨率分别近似于Ni,Ti固体相应量的平均值。

Monte Carlo method is used to simulate energies and space distributions of low-energy electrons scattering （E0≤5 keV） in Ni, NiTi and Ti bulks. The energy distributions of backscattering electrons （BSEs）, depth and surface distributions of BSEs, absorbed elections （AEs） and the energy loss are analyzed. Results show that （1）with the decrease of the energy E0 of incidence electrons, depths of BSEs, AEs, and the energy loss in three bulks decrease, and their resolutions increase; （2）for the same E0, depths of BSEs, AEs and the energy loss have the order of Ni〈NiTi〈Ti, resolutions have the con- trary order of Ni〈NiTi〈Ti; （3）for the same E0, depths of BSEs, AEs, and the energy loss for NiTi, as well as resolutions are approximate to the average ones of Ni and Ti, respectively.