摘要
介绍了扫描电子显微镜的工作原理和特点,特别是近几年发展起来的环境扫描电镜(ES-EM)及其附带分析部件如能谱仪、EBSD装置等的原理、特点和功能,并结合钢铁材料研究展望了其应用前景。
The present paper introduces the basic principle and characteristics of the Scanning Electron Microscope,especially of the Environmental SEM and its accessories such as EDS and EBSD etc., and also discusses the application of the modern SEM in the material science.
出处
《武钢技术》
CAS
2005年第6期36-40,共5页
Wisco Technology
关键词
环境扫描电镜
能谱仪
EBSD装置
environmental SEM
energy dispersive X- ray spectrometry
electron backscatter diffraction
