摘要
介绍X射线光电子能谱(XPS)分析类金刚石(DLC)膜的原理与方法,探讨分峰拟合计算时参量设定对分析结果的影响,改进拟合方法,拟合结果更准确,结果的一致性好。
The principles and methods of analyzing diamond-like carbon（DLC） films by the X-ray photoelectron spectroscopy（XPS） were introduced. The influence on curve fitting was discussed. We improved the curve fitting method with given difference between sp^3 and sp^2 position, and the fitting results were more accurate and more consistent.
出处
《现代仪器》
2005年第6期18-20,共3页
Modern Instruments
