摘要
微细加工技术是现代机电领域新兴学科微机电系统(MEMS)研究的关键技术之一。分析了近年来微机械领域的主要微细加工方法、能达到的加工尺度与水平、加工范畴及应用;阐述了微细加工技术的发展趋势。
The micro-machining technology is one of the key technologies in emerging micro electro mechanical system（MEMS） in modern mechtronical domain, this paper analyzes the main micro-machining processes, precision and level which could achieve and application in recent years. It also introduces micro-machining technology development tendency.
出处
《机械制造与自动化》
2005年第6期64-66,共3页
Machine Building & Automation
