摘要
质子交换法是制作铌酸锂光波导的常用方法,介绍了液相和气相质子交换法制作光波导的原理及工 艺,对气相法形成波导的损耗比较低的机理进行了探讨,并且提出了提高质子交换速度的方法。
The characters of proton-exchanged waveguide were mainly presented. The difference of the waveguides which were exchanged in benzoic acid liquid and vapour benzoic acid was discussed. Some methods about how to improve the reaction speed in vapour benzoic acid were also discussed.
出处
《光电子技术与信息》
2005年第6期6-9,共4页
Optoelectronic Technology & Information
关键词
集成光学
光波导
质子交换
气相质子交换法
integrated-optics
waveguide
proton exchange（PE）
vapour proton exchange（VPE）
