全密封超薄碳纳米管玻璃平板字符显示器件制造工艺的初步探讨

Initial Approach to Technology of a Fully Sealed Super Thin Glass Flat Panel Character Display Tube With Carbon Nanotubes Field Emission Electrode

利用自制的场助热丝化学气相沉积设备,在不锈钢电极的部分选取表面上,摸索出了直接生长碳纳米管(CNT s)勿须涂敷催化剂的新方法。利用得到的高定向多壁碳纳米管薄膜,研究出一种制造大面积实用碳纳米管阵列场发射(CNT s/FEA)阴极的新方法。经真空条件下的发射特性测量及SEM等检测手段肯定了这种CNT s/FEA阴极的实用性。从工艺流程角度出发,初步探讨了静态工作制式下,采用碳纳米管做电极后,实现一种全密封超薄碳纳米管玻璃真空字符(或图像)显示器件的可能性。10多只封离管共显示过3种类型的字型(图像),全部管厚仅为2·7mm。实验结果不仅提供了一种碳纳米管阴极在玻璃真空平板型器件内应用的方法,也摸索出了一条实现小尺寸双色(或多色)字符(图像)静态(或动态)显示的廉价、节能途径。

By using a self-made field assistant hot filament chemical vapor deposition （FAHF-CVD） equipment, the carbon nanotubes （CNT＇s） thin film was grown directly on the selective surface of the stainless steel electrode, without＇the step of catalyst deposition. A new method to fabricate a large area real-life CNT＇s field emission array（FEA） electron source （CNT＇s/FEA） has been realized successfully from prepared high-aligned CNT＇s thin film. The practicality of this kind of electron source CNT＇s/FEA has been convinced through some measurements including the field emission properties, the SEM etc. Finally, with the view of checking the glass tube＇s technological process, an initial approach to the possibility in realization of a fully sealed super thin glass flat panel character display tube （FCT） has been made. Total over ten sealed tubes have been assembled, all the thickness is only in about 2.7 ram, and three kinds of different characters （or pictures） have been displayed. The experiment results show that not only the CNT＇s/FEA is suitable for FCT, and also provides a new way to realize a kind of small-sized dual （or more） colors character （picture） display tube worked under static station （or dynamic station）, this kind of tube is in low cost and saves energy.