摘要
文章介绍了对真空规管和仪器进行校准的比对法,阐述了校准系统的结构、原理及校准方法;探讨了被校电离规在6种不同的气体中的校准效果及校准前后的差异,说明了气体歧视效应的存在和影响,得出了各气体的相对常数;结果表明,对真空规管及仪器进行校准是必要的。
The comparative measurement method for vacuum gauge calibration is introduced. The construction, principle and process of the calibrator are described. The effects of six kinds of gas on the calibrated ionization gauge are explored and relative sensitivity is obtained. The necessity of the calibration on the vacuum gauge and instrument is proved by the research.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
北大核心
2005年第12期1544-1546,1605,共4页
Journal of Hefei University of Technology：Natural Science
关键词
真空计
比对法
校准
相对灵敏度
vacuum gauge
comparative measurement method
calibration
relative sensitivity
