分层串联空心薄膜电感

The Layer Series of Air-Cored Film Inductors

讨论了采用掩膜方法制备的栅极型空心薄膜电感的分层串联,在100MHz～10GHz范围,两种样品的电感值显示了平稳的频率特性,其数值分别由原来单层的130nH,155nH增加到185nH和280nH;电阻在6GHz以下保持平稳,分别由单层的31Ω,51Ω增加到64Ω和104Ω;品质因素(Q值)在1～6GHz之间达到20以上。

In this paper, we have chiefly discussed the layer series of the grid type air-cored film inductor prepared with the method of masks. In a range of 100 MHz-10 GHz,the inductances of the two samples show their stable frequency properties. Their numerical values are increased from 130 nH and 155 nH to 185 nH and 280 nH respectively. The resistances, maintained stable under 6 GHz are increased from 31 Ω and 51 Ω to 64 Ω and 104 Ω.The quality factor value is over 20 from 1 GHz to 6 GHz.