摘要
The counter-meshing gears （CMG） discriminator is a mechanically coded lock, which is used to prevent the occurrence of High Consequence Events. This paper advanced a new kind of self-assembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the following characters except low cost： 1） it has only discrimination teeth sections; 2） the thickness of each gear layer exceeds one hundred micrometers; 3） it is axially driven by a separate dectronic magnetic micromotor directly; 4） its CMG is made of metal and is batch fabricated in the assembled state; 5） it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6） it has simpler structure. This device has better strength and reliability in abnormal environment compared to the existing surface micro machining （SMM） discriminator.
The counter-meshing gears (CMG) discriminator is a mechanically coded lock, which is used to prevent the occurrence of High Consequence Events. This paper advanced a new kind of self-assembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the following characters except low cost: 1) it has only discrimination teeth sections; 2) the thickness of each gear layer exceeds one hundred micrometers; 3) it is axially driven by a separate electronic magnetic micromotor directly; 4) its CMG is made of metal and is batch fabricated in the assembled state; 5) it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6) it has simpler structure. This device has better strength and reliability in abnormal environment compared to the existing surface micro machining (SMM) discriminator.
基金
ThisWorkisSupportedbyHighTechnologyResearchandDevelopmentProgramofChina(2003AA404210,2005AA404250)andScienceandTechnologyResearchProgramofMinistryofEducationofChina(importance0307)
