基于球杆仪和光栅尺的工作台精度调整(英文)

Worktable Precision Adjustment Based on Error Analysis of Ballbar Transducer and Linear Grating Sensor

用球杆仪和光栅尺同时测量了两轴联动精密工作台的走圆运动．结果显示,光栅尺的主要误差源是测量噪声和定位误差,球杆仪的主要误差源是定位误差．尽管对于单轴实时位置反馈来说,光栅尺的测量精度已经足够, 但是两个方向光栅尺的测量数据不能反映两轴间的相对精度．通过对光栅尺和球杆仪测量的工作台走圆运动测量数据的分析,建立了测量系统的数学模型,在此基础上解耦并识别出了球杆仪和光栅尺的定位误差．提出了根据光栅尺倾角误差实现工作台精度调整的策略．

The errors of two-axis worktable measured by a ballbar transducer and linear grating sensors are studied simultaneously and their characteristics are analyzed. The results show that for the linear grating sensor the main error sources of the measurement are the meterage noise and the installation inclination, while for the ballbar transducer the main error source is the installation eccentricity. Though the single direction measurement precision of the linear grating sensors is high enough, the relative precision of the two axes of the worktable can＇ t be guaranteed by linear grating sensors. The error sources of the measuring system are analyzed and the system error model is established, with which the decoupling of the error measured by linear grating sensors and ballbar transducer is realized and an approach to reduce linear grating sensor errors and realize the high precision adjustment of the worktable is proposed.