非接触大位移动态测量系统设计及实现

Design and Realization of Non-Contact Large Displacement Measuring System

提出一种结构轻巧,驱动及处理电路简单,性能良好的非接触大位移动态测量方案.设计以PSD光电位置敏感器件为核心,利用半导体激光器、透镜成像装置组成的测试系统,突破了由于PSD尺寸因素而影响其测量范围的限制;并给出了信号处理电路.实验表明该系统测量范围宽、测量精度高、结构简单.

In this paper, the author has presented a schedule for designing a non-contact large displacement measuring system with a simple structure, easy initiation, and stable performance. The author has also presented the circuit for signal processing. The measuring system comprises of a position-sensitive detector （PSD）, a semiconductor laser, and a lens image device, which breaks the restrictions of measuring scale because of PSD size. Experiments prove that the system designed has a large measure scale, high measurement accuracy, and a simple structure.