曲面间隙测量电涡流传感器探头的性能研究

Performance of the Eddy Current Sensor Probe for Measuring the Gaps between Curved Surfaces

针对曲面间间隙测量的实际应用,从电涡流传感器的检测原理出发,对传感器探头的测量性能进行了研究.在平面线圈磁场分布计算的基础上,通过修正得到了曲面线圈的磁场分布规律,进而对线圈的测试性能进行分析和预测,实现了线圈参数的优化设计.同时,对曲面测量的各种影响因素进行了分析和试验验证,为电涡流传感器应用于曲面测量提供参考和依据.

Based on the principle of eddy current sensing, the performance of the eddy current sensor probe is investigated for the application of measuring the gaps between curved surfaces. The magnetic field generated by the curved coil is calculated by modifying the formulation that for the planar coil. And then, with the analysis and evaluation of the measurement characteristics of the curved coil, the parameters of the sensor coil is optimally designed. Furthermore, several factors that influence the measurement of the curved surfaces with eddy current sensor is analyzed and tested to give some advices and references.