激光微束仪的激光聚焦系统研究

Research on Laser Focusing System of Laser-microbeam Instrument

提出一种新的激光聚焦系统，它由一个空间滤波系统和８０×聚焦物镜组成，后者为一个双反射式球面系统。用这个激光聚焦系统，激光微束仪能获得直径小于０．５～１μｍ的聚焦光斑。光斑尺寸和空间滤波系统的针孔光阑直径有关。

This paper presented a new laser focusing system which is composed of a spatial filter and 80× focusing objective lens. The lens was designed as double reflective sphere type. Us ing this focusing system, the laser microbeam instrument has got the focal spot size of less than 0. 5--1μm. The focal spot,size depend on the pinhole diaphragm diameter of spatial filter.