厚膜气体敏感元件的研制

RESEARCHS ON THE THICK FILM GAS SENSORS

采用丝网印刷技术制作了厚膜气体敏感元件．测试了其气敏特性，发现元件对乙醇和氢气具有较好的灵敏度和选择性．对元件的加热器特性和气敏特性的一致性进行了研究，在控制好印刷浆料的稀稠度、印刷工艺后。

Thick film gas sensors are made. The characters of gas sensitivity and thick film heater were investigated. These thick film gas sensors have high sensitivity and selectivity to alcohol and H 2. A better identity of the sensors was obtained by controlling suitable conditions.