静电悬浮转子微陀螺及其关键技术

Micro Gyroscope Based on Electrostatically Levitated Rotor and its Key Techniques

静电悬浮转子微陀螺具有比振动式微陀螺精度高的潜在优点,并可同时测量二轴角速度和三轴线加速度。介绍了静电悬浮转子微陀螺的研究现状。对该静电悬浮转子微陀螺/加速度计的工作原理、特点进行了分析,并对实现高精度静电悬浮转子微陀螺/加速度计的关键技术如静电稳定悬浮、微位移检测控制、静电恒速旋转驱动、微机械加工和真空封装技术等进行了探讨。指出这一新颖MEMS陀螺是高精度多轴集成微惯性传感器技术发展的一个重要方向,具有广阔的应用前景和较大的发展潜力。

Micro-machined rotational gyroscope has potential advantage of more accu：＇ate man me prevailing micro-machined vibratory gyroscopes, which is based on an electrostatically levitated rotor and can work as a dual-axis gyroscope and a tri-axis accelerometer simultaneously. Research status of this novel micro-gyro is briefly reported. The working principles of rotational micro-gyro/ accelerometer and its characteristics are presented. The key techniques for realizing high performance of this micro-gyro/accelerometer, such as electrostatic stable levitation, micro displacement detection and control, rotation driving and speed control, structure micro-machining and vacuum packaging, are investigated. It is pointed out that, in developing high precision micro-machned inertial multi-sensor, this novel MEMS gyroscope is an important candidate, and will be well,teveloped in near future due to its wide prospects of applications.