用辉光放电等离子体制备湿敏膜的研究

A Study of Humidity-Sensitive Thin Film Prepared by Glow Discharge Plasma

本文应用射频辉光放电等离子体技术在电容式耦合反应室内制备等离子体聚苯乙烯（ＰＰＳ）膜，采用铝膜－聚合膜－金膜的平板电容器结构研究了聚合膜电容器的电容量随湿度变化的特性。结果表明，等离子体聚合膜电容器对湿度变化的响应时间在１．５ｍｉｎ之内，湿滞和温度系数小。此外，还分析了聚合膜的结构并讨论膜结构与湿敏性能的关系。

Plasma-polymerized styrene (PPS) films were prepared by radio frequency (RF) glow discharge through styrene vapour in a capecitively coupled plasma reactor.Parallel plate capacitors were made in the form of Al-PPS-Au to be used as capecitive humidity-sensitive elements. The measurement of humidity properties showed that the elements had a small hysteresis, low value of temperature coefficient and a response time of less than 1. 5 min. The structure of PPS films were analyzed by X-ray photoelectron spectroscopy (XPS) and infrared spectroscopy (IR). The correlation between the structure of PPS film and the humidity property was discussed.