p型金刚石欧姆接触的研究

Study on the Ohmic Contact for p-Type Diamond

金刚石的欧姆接触是制造半导体器件的关键技术之一。简要综述了近年来p型金刚石制备欧姆接触的研究进展,结合器件的发展和实际工艺的要求,讨论了改善欧姆接触特性的途径和方法,指出目前存在急需解决的一些问题。

Ohmic contact of diamond is one of the key issues for semiconductor devices. The progresses on preparation of ohmic contact of p-type diamond are reviewed. Combining the developments of device with demands of processing, the approaches to improve the ohmic contact characterization are discussed, and the problems remained to be solved are pointed out.