氧化锌基SnO_2－ZnO　UPF制备工艺对其微观结构的影响

Influence of SnO_2-ZnO UPF Compound Technique on Its Surface Morphology and Structures

采用直流气体放电活化反应蒸发沉积法，通过二次蒸镀，制备了以氧化锌为衬底的ＳｎＯ_２－ＺｎＯ复合型功能气敏薄膜。讨论制备工艺对该薄膜微观结构的影响，并提供了宏观性质和微观机理分析结果。

SnO2-ZnO UPF(Ultrafine Particle Film)was prepared by DC gas discharge activiting reaction deposition technique. The effects of the compound technique on topography and phase microstructures of the bilayer UPF were studied by SEM,XRD.The results show that the surface particle sizes were mainly controlled by discharge voltage,oxygen gas pressure and the evaporation temperature. This bilayer UPF is a polycrystalline film which grows preferentially in the direction of SnO2(002)plane with a island-like growth,and composed of SnO,SnO2 phase;ZnO UPF layer exhibits amorphous structures.