微小激光加工区温度测量的准确性研究

Temperature Measurement Precision for Small Laser-processed Region

利用辐射测温系统对半导体微细加工高温区进行温度测量时,所测温度的准确性及分布细节会受多种因素的影响。理论分析表明,对于像差校正系统,杂散光及探测器光敏面面积是影响测温系统温度测量准确性的主要因素,因此将原有探测器更改为带单模尾纤式探测器以限制杂散光并减小光接收面面积。实验证明这种方法是有效的,基本满足微小面元温度测量的要求。

The effects of many factors on the measurement precision in radiometric pyrometer have been analyzed. The theoretical results show that stray light and the photosensitive area of the detector mainly influence precision of radiometric pyrometer in aberration correction system. So, a single-mode fiber pigtailed detector which can restrict stray light and reduce receiving surface area is used to substitute for original detector. Experimental results show that this method is feasible and meets the demand of the radiometric temperature measurement of small region.