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电磁MEMS及其在生物医学工程中的应用 被引量:2

Electromagnetic MEMS Technology and Applications in Biomedical Engineering
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摘要 阐述了电磁 M EM S 技术在生物医学工程中的应用,包括微流体及微阵列芯片上基于磁珠的生物检测、核磁共振 (N M R )及其他生物医学器械微型化改进等。介绍了电磁 M EM S 技术中的典型制作技术,展望了电磁 M EM S 技术的应用前景。 The application of electromagnetic MEMS on-chip magnetic bead-based bio-detection using both in biomedical field is introduced, including microfluidic and microarray chips, improvement of miniature NMR, and other biomedical instruments and so on. The specific microfabrication of electromagnetic MEMS is presented, and the applying prospect of electromagnetic MEMS is also given.
出处 《微纳电子技术》 CAS 2006年第1期37-42,63,共7页 Micronanoelectronic Technology
基金 上海市AM基金(AM0303) 上海市纳米专项(0452NM038)
关键词 电磁微机电系统 生物医学工程 芯片 electromagnetic MEMS biomedical engineering chip
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