基于光散射原理的尘埃粒子检测仪

The Particle Detector Based on Principle of Light Scattering

介绍了一种自行研制的尘埃粒子检测仪的测量原理和工作系统,该仪器用于检测洁净室中空气的尘埃粒子数和监测洁净度级别。尘埃粒子检测仪基于光散射原理,工作系统主要分为传感器、电路、气路和中央控制四部分。选用了直角散射光学传感器接收信号光,经光电转换和电路处理,可获得环境的尘埃粒子数目和尺寸信息。气路部分中采用了先进的微桥气流质量传感器,能够精确控制气体的采样量,通过单片机反馈控制,进一步提高了仪器的稳定性和精度。试验数据证实了该尘埃粒子检测仪具有市场上同类检测仪器的检测能力。

The theory and system of a particle counting instrument are introduced based on principle of light scattering, which is used in clean room. The instrument includes an optical sensor, electric circuit, gas channel and center control unit. It adopts an advanced microhridge mass airflow sensor as flowmeter which can accurately control the sampling of air. The stability and precision of the system are enhanced because of the feedback control of the singlechip. The experimental data have approved the counting ability.