悬臂梁式SAW加速度计的信号特征及测量方案

On the New SAW Accelerometer with Cantilever Beam

加速度计设计的传统思路是设法利用好阻尼使悬臂梁尽快进入稳定状态,实现加速度的准确测量。然而,由于阻尼问题的复杂性和时变性,实际声表面波(SAW)加速度计的悬臂梁在外施待测加速度的作用下,常常会出现短暂位移振荡,进而引起声表面波谐振器(SAWR)谐振频率的振荡变化。本文分析了悬臂梁式SAW加速度计在高敏感、欠阻尼工况下SAWR信号的动态特征,提出了一种实时性较强的待测加速度值测量方案,并对该测量方案进行了必要的误差分析。

When the system damp is actually less than the design value fixed in advance because of some reasons, acceleration inertia force is able to drive a frequency surge of resonance oscillation on surface acoustic wave （SAW） resonator which is on the surface of cantilever beam of accelerometer, and the surge lead to reducing of sensitivity to acceleration and measure speed. Therefore, the dynamic characteristic of cantilever beam of SAW accelerometer and the frequency surge of SAW resonator are analyzed. And a new measuring method to acceleration on line is put forward for getting the acceleration measure value as soon as possible and heightening measure stability and accuracy. At last the error of measure is discussed.