新型开放式液滴驱动芯片

Novel Open-Structure Droplets Actuating Chip

研制出一种利用介质上电润湿(Electrowetting-on-dielectric,EWOD)机理的新型开放式离散液滴驱动器,它采用重掺杂多晶硅制备微电极阵列,氧化硅以及碳氟聚合物薄膜作为复合疏水介质层,悬挂的细硅铝丝作为参考零电极。通过控制施加在微电极阵列上的脉冲电压时序,来精确操作和控制疏水介质层表面液滴的运动。该器件采用了悬挂线开放式结构,在空气环境下,在40V低驱动脉冲电压下成功实现了液滴的传输。

A novel open-structure discrete droplets actuation based on Electrowetting-on-dielectric is presented, consisting of heavy doped poly-silicon used as the microelectrode array, the complex layer of the SiO2 film and the fluorocarbon polymer film as the hydrophobic dielectric layer, the suspended silicon-aluminum line as the ground electrode. By controlling the sequence of voltage pulses applied to the microelectrode array under the dielectric layer, droplets on the surface of the hydrophobic layer could be manipulated. Owing to the suspended-line structure, the transportation of droplet was successfully achieved in air by applying the voltage pulse of 40V.