一种基于热执行器的多晶硅断裂强度的电测量法

Method for Electrical Measurement of Fracture Strength of Surface Micromachined Polysilicon Beams Based on a Thermal Actuator

由于在线测试的要求,断裂强度将不便于采用显微镜观测、拍照和加外力等方法来测量。使用发热梁作驱动将待测多晶硅拉断,只须读取拉断时外加的电流就能计算出多晶硅的断裂强度。就是说,使用电测量的方法测试多晶硅的断裂强度,有测试方法简单的效果。并且通过模拟和实验验证,其精度足以满足工艺线在线测试的要求。

Because of the requirement of in-situ measurement, it is not convenient to measure fracture strength by using microscope, taking pictures, applying forces and so on. This paper applied a thermal actuator to fracture the polysilicon beam under test, and then calculates the fracture strength of the polysilicon by reading the applied current just when the polysilicon film was fractured.The electrical method is proposed to measure the fracture strength of polysilicon,so the measurement is simple. Simulation and experiment show an agreement with each other.