利用EBSD技术分析银薄膜中的晶粒异常生长、孪晶及织构

Abnormal growth,twinning and texture of Ag thin film analyzed by EBSD technique

利用背散射电子衍射(EBSD)技术分析了银薄膜中出现的晶粒异常生长现象,确定了其与孪晶和织构的关系。结果表明,较强〈111〉织构形成时,孪晶面之一可平行于薄膜表面,频繁的孪生不明显改变较强的〈111〉织构,但可能造成出现六角锥体;初步分析认为,六角锥体是一对孪晶,表面是两个晶粒的六个{111}面;当制备或生长条件不能形成强〈111〉织构时,孪晶面不平行于薄膜表面,孪生后的取向继续偏离〈111〉。

The electron Backscatter Diffraction technique was used to analyze abnormal growth in Ag thin films and to determine the relationship between twinning and texture. It was found that in the presence of a 〈 11 1 〉 texture one twin boundary is parallel to the film surface. Frequent twinning did not change texture significantly, but may lead to the formation of hexagon pyramids. Each pyramid is composed of a twin pair, and its surfaces is covered by 6 { 111 } planes from two grains with a twin relationship. When the 〈 1 11 〉 texture is not strong further weakening of the 〈 1 11 〉 texture occurs due to twinning.