摘要
本文叙述了研制全屏蔽同轴微型热电偶的过程，它包括了溅射、电泳漆、真空镀膜等工艺，这在国内是首创。
The Process of developed total shield coaxial miniture thermocouple were described.The varioustechnology,including the sputtering、the electrophoresis paint and the vacuum coaling were used.The study origi-nates in our country.
出处
《中国医学物理学杂志》
CSCD
1996年第1期58-59,共2页
Chinese Journal of Medical Physics
关键词
医疗器械
微型热电偶
研制
Thermocouple Coaxial Miniture Thesputtering Electrophoresis paint Vacuum coaling
