热处理对Ag_xO薄膜结构及成份的影响

Effect of Thermal Treatment on the Structure and Component of Ag_xO films

利用X射线衍射谱(XRD)和X射线光电子谱(XPS)研究了热处理对AgxO样品的结构及成份的影响。研究结果表明所有制备的AgxO样品基本为无定型,并且AgO和Ag2O两种成份共存;两组具有代表性的AgxO样品经过高温热处理后分别呈现了(Ag+Ag2O)和Ag2O的多晶结构,结构及成份的巨大差异与样品制备条件息息相关;AgO和Ag2O两种成份的热分解临界温度分别为200℃和300℃;热处理过程中,伴随着AgxO的热分解及体内的氧原子向样品表面的扩散过程,并且Ag2O具有相对致密的结构。

The effect of thermal treatment on the structure and component of AgxO samples was carefully studied by X-ray diffraction spectroscopy （XRD） and X-ray photoelectron spectroscopy （XPS）. Experimental results show that all the as-deposition Ag, O samples are basically amorphous and AgO and Ag20 components coexist; Two groups of typical AgxO samples thermally treated demonstrate （Ag ＋ Ag20） and Ag20 multi-crystalline structures, respectively. A big difference in the structure and components has a close relationship with preparation parameters; The critical temperature of thermal decomposition of AgO and Ag20 components is accurately confirmed as 200℃ and 300℃ , respectively; The thermal decomposition of AgxO and diffusion of internal oxygen atoms to sample surface take place at the same time during thermal treatment and Ag20 has a more compact structure.