期刊文献+

光栅成像光谱仪同心光学系统研究 被引量:18

Research of the concentric optical system of grating spectrometers
下载PDF
导出
摘要 详细讨论了光栅同心光谱仪的波像差表达式。当入射光束与出射光束平行时,单色同心光学系统空间任一点成几何理想像。揭示了光栅同心光谱仪满足远心条件时,光瞳像差仅有三级球差和场曲及高级剩余像差,系统需要校正场曲和球差。光栅必须放在前后光学部分的焦平面上,满足远心条件。最佳光栅刻线是等间隔平行线。介绍了两种典型同心光学系统的结构和特性。 The general expression for the pupil wave aberration of concentric grating spectrometers is discussed in detail in this paper. If a monocentric system existed for which an incident collimated beam emerged as exactly collimated, then the system would give geometrically perfect imaging of any point in space. It is shown that if monocentric system is assumed to be telecentric, the wave aberration of the pupil generally include third-order pupil spherical aberration, tangential field curvature and high-order aberration. Spherical aberration and tangential field curvature of the systems should be corrected. The grating should be located at the focal plane of the preceding optics and at the back focal plane of the following optics. The system therefore assumed to be telecentric in both object and image spaces. Preferred grating ruling pattern has all the rulings in parallel planes with a constant space between the planes. The structure and properties of two such monocentric systems are discussed.
出处 《光学仪器》 2005年第6期38-42,共5页 Optical Instruments
关键词 应用光学 成像光谱仪 同心光学系统 远心条件 波像差 光瞳 光栅 applied optics imaging spectrometer concentric optical system telecentric condition wave-front aberration optical prating grating
  • 相关文献

参考文献10

  • 1黄元申,倪争技.同心三反射镜光学系统研究[J].光学仪器,2005,27(2):42-46. 被引量:11
  • 2Charls G W.Monocentric telescopes for microlithography[J].Optical Engineering,1987,26(4):300~303.
  • 3Dyson J.Unit magnification optical system without seidel aberrations[J].Journal of the Optical Society of America,1958,49(7):713~716.
  • 4Offner A.New concepts in projection mask aligners[J].Optical Engineering,1975,14(2); 130~132.
  • 5Offner A.Annular field systems and the future of optical microlithography[J].Optical Engineering,1987,26(4):294~299.
  • 6Mertz L.Concentric spectrographs[J].Applied Optics,1977,16(12):3122~3124.
  • 7WelfordWT著 陈晃明 梁丽轩译.对称光学系统的像差[M].北京:科学出版社,1982..
  • 8Hamilton W R.The Mathematical Papers of Sir[M].London:Cambridge University Press,1931.
  • 9Noda H.Namioka T,Seya M,Geometric theory of the grating[J].Journal of the Optical Society of America,1974,64(8):1031~1036.
  • 10Lobb D R,Theory of concentric designs for grating spectrometers[J].Applied Optics,1994,33(13):2649~2658.

二级参考文献5

  • 1Offner A. New concepts in projection mask aligners[J]. Optical Engineering, 1975, 14(2):130- 132.
  • 2Offner A. Annular field systems and the future of optical microlithography[J]. Optical Engineering, 1987,26 (4) :294-299.
  • 3Charls G W. Monocentric telescopes for microlithography[J]. Optical Engineering, 1987,26 (4):300- 303.
  • 4Paul E. Mirror anastigmat with two concentric spherical surfaces[J]. Journal of the Optical Society of America, 1959,49(9):877-886.
  • 5Lobb D R. Theory of concentric designs for grating spectrometers[J]. Applied Optics, 1994,33(13) :2649-2658.

共引文献10

同被引文献202

引证文献18

二级引证文献104

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部