摘要
介绍了新型共平面精密二维平台的机械设计与精密测量系统的研发.机械结构引入共平面理论,使得X方向和Y方向的导轨面在同一高度平面,减小了Z向阿贝误差和累积误差,兼顾对称设计,减小力变形、热变形;研制出高精度线性衍射光栅干涉仪,以光栅衍射原理和偏振光学为理论基础,配合信号细分原理,使得该系统可以达到纳米级分辨率.
An innovative coplanar precision xy-stage design together with a measurement system was devel- oped. The coplanar concept employed in the mechanical design makes the guide planes in .x- and y- in the same height. As a result, the Abbe＇s error and the cumulative error can be reduced. The symmetric structure is another highlight in this design that is used to eliminate the structure deformation by force and temperature change. A novel precision Linear Diffraction Grating Interferometer （LDGI） was researched. Based on the principle of grating diffraction and polarization, this measurement system can get nanometer resolution via using the signal subdivision theory.
出处
《中国计量学院学报》
2005年第4期264-267,共4页
Journal of China Jiliang University
基金
国家自然基金重大国际合作资助项目(No.50420120134)
关键词
共平面
对称
线性衍射光栅干涉仪
信号细分
coplanar
symmetric
linear diffraction grating interferometer （LDGI）
subdivision
