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脉冲激光沉积技术制备Li_2O-V_2O_5-SiO_2薄膜 被引量:1

Li2 O-V2 Os-SiO2 Thin Films Prepared by Pulsed Laser Deposition
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摘要 采用355nm脉冲激光沉积(PLD)技术,以Li6.16V0.61Si0.39O5.36为靶材制备Li2O-V2O5-SiO2薄膜,考察了反应气氛压强、激光能量密度、基片温度等对薄膜结构和性质的影响。结果表明,随着基片温度升高及激光能量密度增大Li2O-V2O5-SiO2薄膜更致密,且室温离子电导率随之增大。在O2压强6.7Pa、激光能量密度12J/cm2和基片温度300℃条件下制备了室温离子电导率为4×10-7S/cm、离子迁移数接近1.0(tion>99.99%)、厚度均匀、无针孔和裂缝的非晶态Li2O-V2O5-SiO2薄膜。
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2005年第6期16-19,共4页 Transactions of Materials and Heat Treatment
基金 国家自然科学基金项目(20083001) 河南科技大学人才科研基金项目(04015) 河南科技大学青年科研基金项目(2004QN010)
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参考文献10

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同被引文献11

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  • 2蔡洪涛,李幸福,张新安,丁玲红,张伟风.(110)取向镍酸镧导电薄膜的制备及性能研究[J].天中学刊,2006,21(2):25-27. 被引量:2
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  • 8陈红举,张婷,丁玲红,等.一种镍酸镧陶瓷靶的制备方法:中国,101712549[P].2010-05-26.
  • 9常天海,孙凯.ITO薄膜的磁控溅射工艺优化研究[J].真空科学与技术学报,2009,29(3):324-327. 被引量:9
  • 10程晓蕾,刘志,施焕儒,简建明,徐杨.磁控溅射和退火制备ZnO/SiO_2复合薄膜[J].材料热处理学报,2012,33(1):15-20. 被引量:4

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