摘要
论述了氦中四氟甲烷、氧化亚氮和六氟化硫混合气体标准物质的制备方法、性能考察、不确定度计算,经与国内外同类标准物质比较,证明量值准确可靠、方法可行。
It introduces the method of preparation, research of performance and calculation of uncertainty of mixed gas reference material of tetrafluoromethane, nitrous oxide and hexafluoride in helium. It is proved that the magnitude of the reference material is accurate and the method of preparation is feasible after compared with similar reference material from home and abroad.
出处
《低温与特气》
CAS
2005年第6期20-24,38,共6页
Low Temperature and Specialty Gases
关键词
氦
四氟甲烷
氧化亚氮
六氟化硫
混合气体
标准物质
不确定度
比对分析
helium
tetrafluoromethane
nitrous oxide
hexafluoride
mixed gas
reference material
uncertainty
comparison analysis
