基于体硅湿法的高性能微加速度传感器技术

The Technology of the High Performance Accelerometer Based on Wet Etching Bulk Silicon

低的输出噪声、小的上电漂移和强的抗扰能力是高性能微加速度传感器的基本要求。利用一些结构和电路上有针对性的设计,可以有效地提高器件在这三方面的性能。实际制作的样品表明,传感器开环的输出噪声已被控制在0.3μV/Hz,上电稳定后的漂移在100μV内。

Low noise, small shift and strong capability for anti -jamming are the basic requirements for the high performance micro - accelerometer. Using a few pertinent design in structure and circuit, you can availably enhance the capability for the three sides. noise of sensor is controlled below 0. 31μV/√Hz, the excursion after power supply stable less than 100 μV.