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解析式直流辉光放电等离子体理论模型的改进

Analytic model modification for DC glow discharge plasma
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摘要 对作者前期建立的自洽、解析式直流辉光放电等离子体理论模型进行了改进。考虑到电子能量分布,认为电子碰撞电离速率系数f取决于电子的迁移速度VE和扩散速度VD,而不象以前假设电离速率系数f为一常数。另外,不再将形式为(C1cosmz+C2sinmz)的通解简化为形式为C(cosmz+sinmz)的特解,改进后的理论模型仍为自洽的解析式理论模型,它的适用范围更广,与实验结果更为接近。 In this presentation,the modification of the analytic model developed previously has been carried out with the consideration of electron energy distribution,i. e. the ionization coefficient f of electron collision with neutral moleculars is contributed from both of electron drift velocity and diffusion velocity while it was assumed to be a constant in the previous model. Another improvement is that the general solution like (C1 cosmz+C2sinmz) has been also taken in the present model while the particular solution like C(cosmz+sinmz)was employed in previous one. The modified model is also in self--consistent and analytic forms and the agreements between the theory and the experimental results are much better than before.
出处 《清华大学学报(自然科学版)》 EI CAS CSCD 北大核心 1996年第5期79-83,共5页 Journal of Tsinghua University(Science and Technology)
关键词 辉光放电 解析式 低温 等离子体 glow discharge analytic form low temperature plasma
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参考文献5

  • 1郭小明,Acta Phys Sin,1995年,4卷,12期,906页
  • 2郭小明,物理学报,1995年,44卷,4期,565页
  • 3郭小明,1993年
  • 4白秀庭,J Appl Phys,1992年,71卷,12期,5820页
  • 5白秀庭,J Appl Phys,1992年,71卷,12期,5826页

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