摘要
对作者前期建立的自洽、解析式直流辉光放电等离子体理论模型进行了改进。考虑到电子能量分布,认为电子碰撞电离速率系数f取决于电子的迁移速度VE和扩散速度VD,而不象以前假设电离速率系数f为一常数。另外,不再将形式为(C1cosmz+C2sinmz)的通解简化为形式为C(cosmz+sinmz)的特解,改进后的理论模型仍为自洽的解析式理论模型,它的适用范围更广,与实验结果更为接近。
In this presentation,the modification of the analytic model developed previously has been carried out with the consideration of electron energy distribution,i. e. the ionization coefficient f of electron collision with neutral moleculars is contributed from both of electron drift velocity and diffusion velocity while it was assumed to be a constant in the previous model. Another improvement is that the general solution like (C1 cosmz+C2sinmz) has been also taken in the present model while the particular solution like C(cosmz+sinmz)was employed in previous one. The modified model is also in self--consistent and analytic forms and the agreements between the theory and the experimental results are much better than before.
出处
《清华大学学报(自然科学版)》
EI
CAS
CSCD
北大核心
1996年第5期79-83,共5页
Journal of Tsinghua University(Science and Technology)
关键词
辉光放电
解析式
低温
等离子体
glow discharge
analytic form
low temperature plasma