影响大电流热阴极辉光放电稳定工作的因素

Factors Affecting the Stability of Large Current Hot Cathode Glow Discharge

大电流热阴极辉光放电用于等离子体化学气相沉积金刚石膜,有效地提高了沉积速率和膜品质.大电流辉光放电具有较强的向弧光放电转化趋势,本文研究了影响大电流热阴极辉光放电稳定工作的因素,结果表明,阴极温度、表面形貌、阴阳极位置和尺寸配置关系等对辉光放电的稳定性均有不同程度的影响.

Large current hot cathode glow discharge was used for plasma chemical vapor deposition of diamond films. It improved deposition rate and films quality efficiently. Large current glow discharge has a strong tendency to transform to arc discharge. This paper focuses our attention on the factors affecting the stability of large current hot cathode glow discharge. The research results show that the cathode temperature, the cathode surface state and the size and place disposition between cathode and anode have influences on the stability of glow discharge, respectively.