用于ICF靶的空心玻璃微球的干凝胶法制备

Fabrication of hollow glass microspheres used for ICF targets by dried-gel method

为用干凝胶法制备用于ICF靶的空心玻璃微球（HGM）．研究了载气组份、温度和压力对成球过程和HGM品质的影响，优化了制备工艺参数。结果表明：提高载气中氦气的含量，有利于增加干凝胶粒子的成球率和HGM的纵横比；适当提高载气中氩气的含量，有利于提高HGM的表面质量。降低载气压力可以提高HGM的纵横比；升高载气温度可以提高干凝胶粒子成球率和HGM品质。当载气中氦气的体积分数在50％～80％，载气压力在（0．75～1．00）×10^5Pa，载气温度在1500～1650℃时．干凝胶粒子的成球率较高，HGM的球形度、同心度和表面光洁度较好。制备得到了直径100-500μm、壁厚0．5～3．0μm的HGM，其耐压强度、抗大气侵蚀性能和表面粗糙度等指标均满足ICF物理实验要求。

The parameters that affect the transformation process from drie-gel to microshell and the hollow glass microsphere （HGM） quality were investigated. The results show that increasing the volume fraction of Helium in furnace atmosphere can raise HGM yield and aspect ratio, but increasing the volume fraction of Argon properly is favorable for HGM surface finish. Decreasing furnace atmosphere pressure will increase HGM aspect ratio. HGM yield and quality increase with the increase of the furnace atmosphere temperature, When the volume fraction of helium in furnace atmosphere ranges from 50% to 80%, the furnace atmosphere pressure from 0. 75 × 10^5 Pa to 1.00 × 10^5 Pa, the furnace atmosphere temperature from 1 500℃ to 1 650℃, high-quality HGM can be fabricated with high yield. Under the above optimized fabrication process parameters, hollow glass microspheres with a diameter of 100-500μm, a wall thickness of 0.5-3.0μm, a surface finish better than 5 nm, a concentricity better than 97%, a sphericity higher than 99% were fabricated, whose geometric characteristics, surface finish and failure pressures meet the stringent reauirements for ICF targets.~i