液中测量型原子力显微镜的研究

The Study on the Atomic Force Microscope(AFM) in Liquid

简述了使用临界角角度传感器的探针驱动角度检出型ＡＦＭ的测量原理及在液体中进行测量的原理。

In this paper,the principle of microcantilever drive type AFM using angular sensor composed of critical prisms and the principle of measurement in liquid are described,the measured results in air and water are compared and analyzed.