衍射法细丝直径的精密测量

Precision Measurement of the Diameter of Thin Thread by Using Diffraction Method

分析了激光衍射法测量细丝直径技术中影响精度的几个主要因素，研究了一种微弱衍射条纹的精密处理及识别技术，有效地提高了测量精度。实测结果表明，文中讨论的技术能在１０～５０μｍ的范围内实现正负０．１μｍ的重复精度，分辨力优于０．０１μｍ。

Some main factors which affect the accuracy in measuring the diameter of the thin thread by using laser diffraction theory are discussed in the paper.The accurate processing and recognition techniques for the weak diffraction fringes are studied,thus the measuring accuracy is effectively raised.The experimental results show that the repetition accuracy of ±0.1 μm can be realized within the range of 10～50 μm with the discussed technique in the paper.The resolution is better than 0.01 μm.