阵列式共焦显微系统超分辨特性的研究

Research on the Superresolution Character of Array Confocal Systems

针对光学阵列共焦显微系统中存在分辨力的下降,提出引入一种新型三区振幅型光瞳滤波器以提高其三维探测能力。首先根据基尔霍夫衍射理论推导出光学阵列共焦显微系统三维相干成像公式,与现有理论相比,能更准确地定量描述共焦阵列成像过程,进而将共焦阵列显微技术和光学超分辨技术有机结合,利用三维超分辨评价函数对光瞳滤波器的参数进行优化设计,通过压缩各探测光路的横向和轴向半极值宽(HWHM),以提高其三维扫描探测能力,从而为实现快速、超精密三维测量提供了一种有效的技术途径。

Aiming at the incomplete theory of the arrays confocal system, the more accurate theoretical model is built,and the new type of three-zone amplitude pupil filter is presented to improve the 3-D detecting ability of the arrays confocal system. The 3-D imaging equation based on Kirchhoff＇s diffraction optic theory in the paper is more accurate,and compared with the existing theory, it can describe the image processing system more exactly. Using the evaluation criterion of 3-D superresolution,the design of the pupil filter is optimized. It can reduce the axial and transversal HWHM of the every detecting channel. The results of computer simulation and experiment prove that the filter can improve the axial and traversal resolution at the same time,which can increase the 3-D measure capability.